Advanced device process Lab.
In the clean room (class 10,000) located in a 330-m² area on the first floor of IRES², users can prototype fusion devices with various materials such as compound semiconductors, silicon, and carbon nanomaterials. Users can manufacture not only single devices such as nitride semiconductor LEDs, transistors, and sensors, but also MEMS chips.
IRES² project research lab.
The Collaborative Research Lab is equipped with observation and evaluation equipment such as a Raman spectrometer and an electron microscope, and devices manufactured in clean rooms can be evaluated.
Equipment:
- Raman spectroscopy system (JASCO NSR-7100)
- Focused Ion Beam system (Hitachi NB-5000)
- Secondary Electron Microscope (Hitachi S-3000N)
IRES² Bio experiment Lab.
The Advanced Bio-Lab is designed as a P1 level laboratory, where processing operations such as cell culturing are possible. Moreover, the laboratory has observation equipment for biological experiments such as confocal microscopes and ion image sensor systems.
Equipment:
- Confocal microscope (Nikon A1Rsi-TY1)
- Ion Imaging System (handmade)
LSI Fab.
The LSI Fab. is one of the top facilities in the world for engaging in all processes related to integrated semiconductor circuits, sensors, and microelectromechanical systems (MEMS), from design to manufacturing and operational characterization.
Equipment:
- Computer aided system for LSI, MEMS and other semiconductor devices design.
- Lithography
- CMOS-IC, MEMS fabrication equipment (max 4inch wafer)
- Packaging, measurement and observation equipment
i線ステッパ
Deep-RIE
イオン注入装置
収束イオンビーム加工装置
温度可変プローバ
電子線描画装置
VBL project research Lab.
Compound semiconductor growth equipment as well as equipment for evaluating their electrical and optical properties are installed in the laboratory.
IRES²-3 Life Science Laboratory
IRES²-3 is a research area specific for animal experiments, enabling applied research of sensing devices developed at the IRES². The main focus of theIRES²-3 is neuroscience, recording neuronal activity through electrophysiological, optical, and behavioral recordings. IRES²-3 has model animals such as genetically modified mice and macaque monkeys.
