Facilities

floor-map Life Science Laboratory VBL project research Lab. Bio experiment Lab. EIIRIS project research lab. TUT-Caltech research Lab. Advanced device process Lab.
AIST-TUT research Lab. LSI Fab.

Advanced device process Lab./ AIST-TUT Collaborative Research Lab.

under construction.

EIIRIS project research lab.

under construction

Equipment:
  • Raman spectroscopy system (JASCO NSR-7100)
  • Focused Ion Beam system (Hitachi NB-5000)
  • Secondary Electron Microscope (Hitachi S-3000N)

EIIRIS Bio experiment Lab.

under construction

Equipment:
  • Confocal microscope (Nikon A1Rsi-TY1)
  • Ion Imaging System (handmade)

LSI Fab.

The LSI Fab. is one of the top facilities in the world for engaging in all processes related to integrated semiconductor circuits, sensors, and microelectromechanical systems (MEMS), from design to manufacturing and operational characterization.

Equipment:
  • Computer aided system for LSI, MEMS and other semiconductor devices design.
  • Lithography
  • CMOS-IC, MEMS fabrication equipment (max 4inch wafer)
  • Packaging, measurement and observation equipment
i線ステッパ

i線ステッパ

Deep-RIE

Deep-RIE

イオン注入装置

イオン注入装置

収束イオンビーム加工装置

収束イオンビーム加工装置

温度可変プローバ

温度可変プローバ

電子線描画装置

電子線描画装置

VBL project research Lab.

under construction

EIIRIS-3 Life Science Laboratory

under construction