{"id":8,"date":"2018-03-16T21:37:58","date_gmt":"2018-03-16T12:37:58","guid":{"rendered":"https:\/\/www.eiiris.tut.ac.jp\/en\/?page_id=8"},"modified":"2024-01-11T10:58:23","modified_gmt":"2024-01-11T01:58:23","slug":"facilities","status":"publish","type":"page","link":"https:\/\/www.eiiris.tut.ac.jp\/en\/facilities\/","title":{"rendered":"Facilities"},"content":{"rendered":"
\"floor-map\" \r\n\"Life\r\n \r\n\"VBL\r\n \r\n\"Bio\r\n \r\n\"EIIRIS\r\n \r\n\"TUT-Caltech\r\n \r\n\"Advanced\r\n \r\n\"LSI\r\n <\/map><\/div>\r\n
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Advanced device process Lab.<\/h1>\r\n

In the clean room (class 10,000) located in a 330-m\u00b2 area on the first floor of IRES\u00b2, users can prototype fusion devices with various materials such as compound semiconductors, silicon, and carbon nanomaterials. Users can manufacture not only single devices such as nitride semiconductor LEDs, transistors, and sensors, but also MEMS chips.<\/p>\r\n

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IRES\u00b2 project research lab.<\/h1>\r\n

The Collaborative Research Lab is equipped with observation and evaluation equipment such as a Raman spectrometer and an electron microscope, and devices manufactured in clean rooms can be evaluated.<\/p>\r\n

Equipment:<\/h5>\r\n
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  • Raman spectroscopy system (JASCO NSR-7100)<\/li>\r\n
  • Focused Ion Beam system (Hitachi NB-5000)<\/li>\r\n
  • Secondary Electron Microscope (Hitachi S-3000N)<\/li>\r\n<\/ul>\r\n
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    IRES\u00b2 Bio experiment Lab.<\/h1>\r\n

    The Advanced Bio-Lab is designed as a P1 level laboratory, where processing operations such as cell culturing are possible. Moreover, the laboratory has observation equipment for biological experiments such as confocal microscopes and ion image sensor systems.<\/p>\r\n

    Equipment:<\/h5>\r\n
      \r\n
    • Confocal microscope (Nikon A1Rsi-TY1)<\/li>\r\n
    • Ion Imaging System (handmade)<\/li>\r\n<\/ul>\r\n
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      \r\n

      LSI Fab.<\/h1>\r\n

      The LSI Fab. is one of the top facilities in the world for engaging in all processes related to integrated semiconductor circuits, sensors, and microelectromechanical systems (MEMS), from design to manufacturing and operational characterization.<\/p>\r\n

      Equipment:<\/h5>\r\n
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      • Computer aided system for LSI, MEMS and other semiconductor devices design.<\/li>\r\n
      • Lithography<\/li>\r\n
      • CMOS-IC, MEMS fabrication equipment (max 4inch wafer)<\/li>\r\n
      • Packaging, measurement and observation equipment<\/li>\r\n<\/ul>\r\n
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        i\u7dda\u30b9\u30c6\u30c3\u30d1<\/p>\r\n<\/div>\r\n

        \"Deep-RIE\"\r\n

        Deep-RIE<\/p>\r\n<\/div>\r\n

        \"\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\"\r\n

        \u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<\/p>\r\n<\/div>\r\n<\/div>\r\n

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        \"\u53ce\u675f\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u52a0\u5de5\u88c5\u7f6e\"\r\n

        \u53ce\u675f\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u52a0\u5de5\u88c5\u7f6e<\/p>\r\n<\/div>\r\n

        \"\u6e29\u5ea6\u53ef\u5909\u30d7\u30ed\u30fc\u30d0\"\r\n

        \u6e29\u5ea6\u53ef\u5909\u30d7\u30ed\u30fc\u30d0<\/p>\r\n<\/div>\r\n

        \"\u96fb\u5b50\u7dda\u63cf\u753b\u88c5\u7f6e\"\r\n

        \u96fb\u5b50\u7dda\u63cf\u753b\u88c5\u7f6e<\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n

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        VBL project research Lab.<\/h1>\r\n

        Compound semiconductor growth equipment as well as equipment for evaluating their electrical and optical properties are installed in the laboratory.<\/p>\r\n<\/div>\r\n

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        IRES\u00b2-3 Life Science Laboratory<\/h1>\r\n

        IRES\u00b2-3 is a research area specific for animal experiments, enabling applied research of sensing devices developed at the IRES\u00b2. The main focus of theIRES\u00b2-3 is neuroscience, recording neuronal activity through electrophysiological, optical, and behavioral recordings. IRES\u00b2-3 has model animals such as genetically modified mice and macaque monkeys.<\/p>\r\n

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        \"\"<\/div>\r\n<\/div>\r\n<\/div>","protected":false},"excerpt":{"rendered":"Advanced device process Lab. In the clean room (class 10,000) located in a 330-m\u00b2 area on the first floor of I […]","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-8","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/pages\/8","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/comments?post=8"}],"version-history":[{"count":5,"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/pages\/8\/revisions"}],"predecessor-version":[{"id":255,"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/pages\/8\/revisions\/255"}],"wp:attachment":[{"href":"https:\/\/www.eiiris.tut.ac.jp\/en\/wp-json\/wp\/v2\/media?parent=8"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}